EXPOSÉ
TE_014[2017]

Ionization manometer for position-dependent UHV/XHV measurement in a recipient



Vacuum technology, cryogenics
(patent / technology / device or chemical substance)

Ionization manometer for position-dependent UHV/XHV measurement in a recipient

Abstract:
Thermal separation of the electron source from the recipient and the ion collector

[pdf-Dokument]

Inventor(s):
Dr. Holger Kollmus



Contact:
TransMIT GmbH
Günter Mosel
Kerkrader Str. 3
D-35394 Giessen
Phone: +49-(0)641-94364-26
Fax: +49-(0)641-94364-99
guenter.mosel@transmit.de